Sample projects

  • Gas-supply systems optimization
  • CVD process optimization
  • Hardware optimization for minimizing the dusty gas on surface effect
  • Simulation of plasma immersed ion implantation process (2D simulation of discharge parameters and 1D simulations of ion energy spectra)
  • 2D simulations of discharge in sputtering deposition device
  • Cooling system optimization
  • Simulations of light absorption and temperature distribution in Laser surface annealing process
  • Simulation of RF/VHF electric field distribution in large scale PECVD facilities
  • Photometry and ellipsometry data simulation
  • Software development for real-time film thickness estimation during chemical mechanical polishing in different ambiences
  • The inverse spectral photometry problem solution for multilayer film coating metrology
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